微电子洁净技术领域空气化学污染控制研究进展

Research progress of air chemical contaminant control in microelectronics cleaning technology field

微电子洁净室内空气化学污染严重影响产品质量和良品率。随着集成电路特征尺寸的日渐微小,空气化学污染控制要求越来越严。本文针对微电子产业洁净技术领域空气化学污染现状和控制技术进行了研究和综述,主要包括污染定义,污染物类别,空气洁净度AMC/ACC等级划分,污染物来源、危害,污染控制策略,污染控制技术。对其发展趋势进行了展望。

Chemical contaminant of air in microelectronic cleanroom seriously affects product quality and yield.With the increasingly small feature size of integrated circuits,the requirements for air chemical contaminant control become more and more strict.This paper studies and summarizes the current situation and control technology of air chemical contaminant in the field of cleaning technology of microelectronics industry,mainly including contaminant definition,contaminant category,AMC/ACC classification of air cleanliness,source and harm of contaminants,contaminant control strategy and contaminant control technology.The development trend is prospected.