芯片厂房洁净空调系统节能运行影响因素研究

Influencing factors of energy efficient operation of clean air conditioning systems in chip workshops

从芯片厂房洁净空调系统的运行特点出发,通过理论分析得到了芯片厂房洁净空调系统的能耗影响因素,通过实测梳理了芯片厂房洁净空调系统的能耗现状及节能潜力。DesignBuilder软件模拟结果表明,冷水机组COP、换气次数、风机效率、新风量、水泵效率、室内设计温度的空调电耗最大节能率分别为39.7%、23.0%、15.4%、11.2%、10.8%、6.0%。SPSS偏相关分析表明,显著性影响因素为冷水机组COP、换气次数和新风量。研究成果可为预期节能量的预测提供依据。

Based on the operating characteristics of the clean air conditioning systems in the chip workshops,the energy consumption influencing factors of the clean air conditioning systems in the chip workshops are obtained through theoretical analysis,and the energy consumption status and energy saving potential of the clean air conditioning systems in the chip workshops are combed through actual measurement.The simulation results of DesignBuilder software show that the maximum energy saving rates of air conditioning power consumption of chiller COP,air change rate,fan efficiency,outdoor air rate,pump efficiency and indoor design temperature are 39.7%,23.0%,15.4%,11.2%,10.8% and 6.0% respectively.SPSS partial correlation analysis shows that the significant influencing factors are chiller COP,air change rate and outdoor air rate.The research results can provide a basis for the prediction of expected energy saving.