摘要
The frequency dependence of scattering parameters of interdigital surface acoustic wave transducers placed on ferroelectric barium titanate(BaTiO_(3))epitaxial film in c-phase coated over magnesium oxide has been studied using the finite-element method(FEM)approach along with the perfectly matched layer(PML)technique.The interdigital transducer which has a comb-like structure with aluminum electrodes excites the mechanical wave.The distance between the fingers allows tuning the frequency properties of the wave propagation.The magnesium oxide is taken as the substrate.The two-dimensional model of two-port surface acoustic wave filter is created to calculate scattering parameters and to show how to design the fixture in COMSOL_(TM).Some practical computational challenges of finite element modeling of SAW devices in COMSOL_(TM)are shown.The effect of lattice misfit strain on acoustic properties of heterostructures of BaTiO_(3)epitaxial film in c-phase at room temperature is discussed in present article for two lowfrequency surface acoustic resonances.
基金
This work was supported by the the Russian Science Foundation[14-19-01676].
