Pd掺杂的SnO_(2)甲烷传感器气敏性能的研究

Preliminary Study on the Performance of Pd-Doped SnO_(2) Methane Sensor

本文研究了Pd掺杂的SnO_(2)材料对于甲烷气体的敏感特性。首先从机理上说明掺杂Pd金属的原因;然后,采用简单的混合研磨工艺制备了Pd掺杂SnO_(2)复合材料;接着,采用刷涂工艺在加热型平板电极上制备了气敏层。研究了所制备的Pd掺杂SnO_(2)气体传感器在不同温度对甲烷气体的敏感特性。结果表明,Pd掺杂在提高SnO_(2)的气敏性能的同时还能降低其工作温度;其中,2 wt%Pd掺杂SnO_(2)的传感器气敏性能最优,在最佳工作温度(200℃)下对500×10^(-6)甲烷的气敏响应值可达3.43,灵敏度提升了45.67倍(50×10^(-6)~1000×10^(-6))。

The sensitivity of Pd doped SnO_(2)to methane gas was studied.Firstly,the reason of doping Pd metal is explained from the mechanism.Then,Pd-doped SnO_(2)composites are prepared by simple mixed grinding process.Thirdly,the gas sensing layer are prepared on the heated plate electrode by brush coating process.The sensitivity of the prepared Pd doped SnO_(2)sensor to methane at different temperatures is studied.The results show that Pd doping can not only improve the gas sensing performance of SnO_(2),but also reduce its working temperature;Among them,the sensor with 2 wt%Pd doped SnO_(2)has the best gas sensing performance.At the best working temperature(200℃),the gas sensing response value to 500×10^(-6)methane can reach 3.43,and the sensitivity is increased by 45.67 times(50×10^(-6)~1000×10^(-6)).