Imaging ultrafast evolution of subwavelengthsized topography using single-probe structured light microscopy

Imaging ultrafast processes in femtosecond(fs) laser–material interactions such as fs laser ablation is very important to understand the physical mechanisms involved. To achieve this goal with high resolutions in both spatial and temporal domains, a combination of optical pump–probe microscopy and structured illumination microscopy can be a promising approach, but suffers from the multiple-frame method with a phase shift that is inapplicable to irreversible ultrafast processes such as ablation. Here, we propose and build a wide-field singleprobe structured light microscopy(SPSLM) to image the ultrafast three-dimensional topography evolution induced by fs lasers, where only a single imaging frame with a single structured probe pulse is required for topography reconstruction, benefiting from Fourier transform profilometry. The second harmonic of the fs laser is used as the structured probe light to improve spatial lateral resolution into the subwavelength region of ~478 nm, and the spatial axial and temporal resolutions are estimated to be ~22 nm and ~256 fs, respectively. With SPSLM, we successfully image the ultrafast topography evolution of a silicon wafer surface impacted by single and multiple fs pulses. The variable formation and evolution of the laser induced periodic surface structures during an ultrashort time are visualized and analyzed. We believe that SPSLM will be a significant approach for revealing and understanding various ultrafast dynamics, especially in fs laser ablation and material science.