摘要
基于两相流模型和颗粒动力学方法,在磁流变液和铁磁颗粒两相条件下,研究了集群磁场中磁流变液的内部流动。具体方法是从理论分析和模拟计算两方面对磁流变抛光过程进行仿真研究,初步研究了集群式磁流变抛光中固液两相流的流场耦合特性,分析了不同磁铁颗粒的粒径对晶圆表面压力分布和剪切力分布的影响,以及铁磁颗粒在磁流变抛光过程中的分布状态。
Based on the two-phase flow model and the particle dynamics method,the internal flow of magnetorheological fluid in the cluster magnetic field is studied under two-phase conditions of magnetorheological fluid and ferromagnetic particles.The magnetorheological polishing process is simulated from two aspects,theoretical analysis and simulation.The flow field coupling characteristics of solid-liquid two-phase flow in cluster magnetorheological polishing are preliminarily studied.The distribution of pressure on the surface of the wafer and the distribution of shear force and the distribution of ferromagnetic particles during magnetorheological polishing were analyzed.
作者
曹建国
张静静
张勤俭
CAO Jianguo;ZHANG Jingjing;ZHANG Qinjian(Mechanical Electrical Engineering School,Beijing Information Science and Technology University,Beijing 100192,China;School of Mechanical,Electronic and Control Engineering,Beijing Jiaotong University,Beijing 100044,China)
出处
《电加工与模具》
2022年第5期58-63,共6页
Electromachining & Mould
基金
北京市自然科学基金项目(3222007)
北京市教育委员会科学研究计划项目(KM202211232022)
北京信息科技大学科研类校内项目-重点研究培育项目(2021YJPY202)。
关键词
磁流变抛光
磁场
流场
耦合分析
magnetorheological polishing
magnetic field
flow field
coupling analysis
