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智能压力传感器校准和烧录系统设计与测试

System Design and Test for Smart Pressure Sensor Calibration and Trimming
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摘要 本文介绍了微机电系统(MEMS)压力传感器及其专用集成电路(ASIC)信号调理电路的校准和烧录系统设计,提出一种新型的自适应通讯设备,在接口复用前提下,能够自动检测多种数字通讯协议。在此基础上,整合了对传感器的校准和烧录,并基于工业通信协议,连接外围设备后可组成一套完整的自动通信系统,最后展示了此系统可达到的测试精度和结果。实现了低成本,高可靠性,容错率高的自动压力传感器校准,烧录系统。具有广泛的实用价值,为实验室、科研院所评估样品,或者企业批量校准、烧录等量产,提供高效、便利的应用解决方案。 This paper introduces the system design of MEMS pressure sensor and ASIC signal conditioning circuit calibration and trimming,proposed a new type of adaptive communication equipment,which can automatically detect a variety of digital communication protocols under the premise of interface reuse.Based on this equipment,with the integration of the sensor calibration and trimming,and through the industrial communication protocol connected with peripheral equipment,the system can form a complete set of automatic operations,at last shows the test accuracy and results.Achieved the goal of low cost,high reliability,high fault tolerance of automatic pressure sensor calibration,trimming system.With a wide range of practical value,for laboratory,scientific research institutions to evaluate samples,or enterprises batch calibration,and trimming for mass production,providing efficient and convenient application solutions.
作者 康健力 王浩 吴骅刚 潘守彬 顾坚俭 KANG Jian-li;WANG Hao;WU Hua-gang;PAN Shou-bin;GU Jian-jian(CSMC technologies Corporation)
出处 《中国集成电路》 2022年第9期57-64,70,共9页 China lntegrated Circuit
关键词 微机电系统 专用集成电路 压力传感器 温漂和非线性的校准 熔丝和单次可编程存储器的烧写 MEMS ASIC Pressure Sensor Temperature Drift and Non-Linearity Calibration Fuse and OTP Trimming
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