基于激光干涉仪的铣床导轨几何误差预测验证

Geometric Error Prediction and Verification of Milling Machine Guide Rail Based on Laser Interferometer

为达到更精确预测机床导轨几何误差的目的,设计一种建立在公差基础上的几何误差预测方法,并构建表面形貌误差和几何误差的映射关系。采样双频激光干涉仪具有高精度、快速响应以及高分辨率的优势,充分满足高精度位移测试的需求。以等距方式对X轴导轨行程设置了37个测量点,滑板到达各测量位置时分别经过6 s停留完成采样过程,仿真结果的圆形标记位置拟合曲线R^(2)参数可以达到理想的拟合精度。实际测量数据与预测结果间存在0.15μm的差值,相对于几何误差测试结果,大部分残差都很小,最大残差被控制在测量结果10%以内。实验结果验证采用该方法能够满足以公差为依据的机床导轨几何误差准确预测。该研究对提高机床精度具有很好的理论指导意义,易于实际推广应用。

In order to predict the geometric error of machine tool guide more accurately,a geometric error prediction method based on tolerance was designed,and the mapping relationship between surface topography error and geometric error was given.Sampling dual-frequency laser interferometer can realize the advantages of high precision,fast response and high resolution,which can fully meet the needs of high precision displacement testing.Thirty-seven measuring points were set for the travel of X-axis guide rail in an equidistance manner.After the sliding plate arrived at each measuring position and stayed for 6 s to complete the sampling process,the R^(2) parameter of the fitting curve of the circular marking position could reach the ideal fitting accuracy.There is a difference of 0.15μm between the actual measured data and the predicted results.Compared with the geometric error test results,most of the residuals are small,and the maximum residuals are controlled within 10%of the measured results.The proposed method can accurately predict the geometric error of the guide rail in the initial design process of the machine tool based on the tolerance.This study has a good theoretical significance for improving the accuracy of machine tools and is easy to be applied in practice.