熔石英元件小尺寸集群损伤修复及检测技术(特邀)

Small-scale cluster damage mitigation and detection on fused silica surface (invited)

针对现有小尺寸集群损伤修复及检测技术仍不完善的问题,重点研究亚表面缺陷多模态原位检测方法,从损伤样件表面损伤数量和尺寸、典型小尺寸损伤的形貌、光热吸收、荧光面积等多项指标进行了系统测量和分析,并开展了磁流变修复研究。研究结果表明:熔石英小尺寸损伤内部的吸收性杂质是影响元件性能的主要因素,在磁流变缎带接触到损伤底部前,损伤的整体吸收和荧光分布呈上升趋势;高重频激光对磁流变修复后的损伤辐照过程是一个由慢变快、由杂质到本体、由边缘逐渐向外扩张的过程,能够有效对磁流变修复后的表面进一步起到修复作用,可作为组合修复工艺的第三道工序。研究结果对光学元件检测表征体系的构建提供参考。

Aiming at the problem that the existing small-scale cluster damage mitigation and detection technology is still imperfect, it focuses on the multi-modal in-situ detection method of sub surface defects, and systematically measures and analyzes the number and size of surface damage of damaged samples, the morphology of typical small-scale damage, light and heat absorption, fluorescent area and other indicators, and carries out magnetorheological repair research. The results show that the absorbent impurities inside the smallscale damage of fused silica are the main factors affecting the performance of the components. Before the magnetorheological ribbon contacts the bottom of the damage, the overall absorption and fluorescence distribution of the damage show an upward trend. The damage irradiation process of high repetition rate laser after magnetorheological repair is a process from slow to fast, from impurity to body, and gradually expanding outward from the edge. It can effectively repair the surface after magnetorheological repair, and can be used as the third process of combined repair process. The research results provide a reference for the construction of optical element detection and characterization system.