摘要
The electron heating characteristics of magnetic enhancement capacitively coupled argon plasmas in presence of both longitudinal and transverse uniform magnetic field have been explored through both theoretical and numerical calculations.It is found that the longitudinal magnetic field can affect the heating by changing the level of the pressure heating along the longitudinal direction and that of the Ohmic heating along the direction which is perpendicular to both driving electric field and the applied transverse magnetic field,and a continuously increased longitudinal magnetic field can induce pressure heating to become dominant.Moreover,the electron temperature as well as proportion of some low energy electrons will increase if a small longitudinal magnetic field is introduced,which is attributed to the increased average electron energy.We believe that the research will provide guidance for optimizing the magnetic field configuration of some discharge systems having both transverse and longitudinal magnetic field.
作者
谭海云
黄天源
季佩宇
诸葛兰剑
吴雪梅
Haiyun TAN;Tianyuan HUANG;Peiyu JI;Lanjian ZHUGE;Xuemei WU(School of Physical Science and Technology&Collaborative Innovation Center of Suzhou Nano Science and Technology,Soochow University,Suzhou 215006,People's Republic of China;Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province&Key Lab of Modern Optical Technologies of Education Ministry of China,Soochow University,Suzhou 215006,People's Republic of China;School of Optoelectronic Science and Engineering,Soochow University,Suzhou 215006,People's Republic of China;Analysis and Testing Center,Soochow University,Suzhou 215123,People's Republic of China)
基金
supported by National Natural Science Foundation of China (Nos. 11975163 and 12175160)
a Project Funded by the Priority Academic Program Development of Jiangsu Higher Education Institutions (PAPD)