加热炉温度场数值模拟研究进展

Advances in Numerical Simulation of Heating Furnace Temperature Field

加热炉温度场数值是解决加热过程中出现问题的重要参数。其中加热炉温度控制的准确性会影响到器件的品质,导致器件后续加工无法进行。如果没有控制好温度,会造成不必要的浪费。因此,对于加热炉温度场数值模拟研究具有很重要的意义。概述了加热炉温度场数值模拟的研究进展,阐述了多种加热炉的数值模拟。通过软件建立模型进行分析,以模拟数据为依据进行加热,模拟数据结果与加热炉实操实测结果基本相符。

The heating furnace temperature field value is an important parameter to solve the problems arising in the heating process.Among them,the accuracy of the heating furnace temperature control can affect the quality of the device and lead to the subsequent processing of the device cannot be carried out.If the temperature is not controlled properly,it can cause unnecessary waste.Therefore,it is of great importance to study the numerical simulation of the heating furnace temperature field.The research progress of the numerical simulation of heating furnace temperature field is outlined,and the numerical simulation of various heating furnaces is described.The model is analyzed by software,and the heating is carried out based on the simulation data,and the simulation data results are basically consistent with the actual measurement results of the heating furnace operation.