不同氧含量三明治结构BaTiO_(3)薄膜的制备及其光电性能研究

Preparation and photoelectric properties of sandwich structure BaTiO_(3)films with different oxygen contents

针对不同氧含量薄膜结构对钛酸钡薄膜微观结构与光电性能的影响进行研究,通过射频磁控溅射法制备高质量的钛酸钡薄膜。设置基片加热温度为350℃,工作气压为1.6 Pa,溅射功率为150 W,当总溅射时间为200 min时,在ITO基片上构建具有“贫氧+富氧+贫氧”三明治结构的钛酸钡薄膜。采用XRD、SEM、XPS等对薄膜微观结构、形貌和元素含量进行表征,采用LCR测试并计算得到薄膜的介电常数及介电损耗值。实验结果表明,制备的三明治结构薄膜厚度为810 nm,其平均可见光透光率可达55%,薄膜的介电常数为3.8,介电损耗值小于0.18。采用“贫氧+富氧+贫氧”三明治结构有利于提高钛酸钡薄膜的结晶性,且有利于提高钛酸钡薄膜的晶粒尺寸,提高钛酸钡薄膜的介电常数,降低其介电损耗值。

The effects of different oxygen content film structures on the microstructure and photoelectric properties of barium titanate films were studied and high-quality barium titanate films were prepared by radio frequency magnetron sputtering.Set the substrate heating temperature to 350℃,set the working pressure to 1.6 Pa,set the sputtering power to 150 W,and under the condition that the total sputtering time is 200 min.The barium titanate films with the sandwich structure of"poor oxygen+rich oxygen+poor oxygen"were constructed on the ITO substrate.The microstructure,morphology and element content of the film were characterized by XRD,SEM,XPS,and the dielectric constant and dielectric loss value of the film were obtained by LCR test and calculation.The experimental results show that the thickness of the prepared sandwich structure film is 810 nm,the average visible light transmittance can reach 55%,the dielectric constant of the film is 3.8,and the dielectric loss value is less than 0.18.Adopting"poor oxygen+rich oxygen+poor oxygen"sandwich structure is beneficial to improve the crystallinity of the barium titanate film,and is beneficial to increase the grain size of the barium titanate film,increase the dielectric constant of the barium titanate film,and reduce the dielectric constant of the barium titanate film.