深振荡磁控溅射的脉冲放电特性

Pulse discharge in deep oscillatory pulsed magnetron sputtering

深振荡磁控溅射(Deep Oscillation Magnetron Sputtering,DOMS)通过一系列调制的电压微脉冲振荡波形,能够实现完全消除电弧放电和靶材近全离化,实现高密度、低离子能量和高束流密度的等离子体沉积.本文综述了DOMS的技术原理和深振荡脉冲放电特性对等离子体离子种类、离子能量的时空演化过程的影响,结果表明,DOMS脉冲参数对靶离化过程的影响遵循电压-时间演变规律,靶离化过程为随短脉冲电压振荡的阶段性离化.

Deep oscillation magnetron sputtering(DOMS) can achieve complete elimination of arc discharge and near total ionization of target through a series of modulated voltage micro-pulse oscillation waveforms,to achieve high density,low ion energy and high beam density plasma deposition. This paper reviews technical principles of DOMS and effects of deep oscillatory pulse discharge on spatiotemporal evolution of plasma ion species and ion energy. Influence of DOMS pulse parameters on target ionization process was found to follow the law of voltage time evolution. Target ionization process is found to be phased ionization oscillating with short pulse voltage.