基于高速转镜的医用钛合金微孔阵列模板制造

Fabrication of Medical Titanium Alloy Microhole Array Substrates Based on High-Speed Polygon Mirror

传统的激光打孔方式效率低、速度慢,而应用激光高速转镜制备医用钛合金微孔模板可以在百秒内制备上万个微孔结构。为此,对高速转镜制备医用钛合金微孔模板进行了研究,探究了激光参数、转镜扫描速度对打孔孔径、深度、锥度、孔形貌的影响,当高重复频率激光功率达到500 W时,钻孔孔直径可达100μm,深度为156μm,锥度趋于0。高转镜扫描速度最大可达1000 m/s,加工前确定孔距、行距等相关参数,加工效率可达万孔每秒。另外,为增大加工孔径,提出一种优化加工工艺技术,对常规转镜旋转扫描时需要进行校正的转镜扫描位置偏差进行利用。此方法可使最终孔直径达到150μm,对生物涂层材料及药物沉积钛合金微孔模板更有益处。

The traditional laser drilling method is inefficient and slow.Preparation of medical titanium alloy microhole substrate by laser highspeed polygon mirror can prepare tens of thousands of microhole structures within 100 s.We primarily focused on the preparation of medical titanium alloy microhole substrates using a highspeed polygon mirror.The effects of laser parameters and the polygon mirror’s scanning speed on the drilling aperture,depth,taper,and hole morphology were investigated.The highrepetitionrate laser with a power of 500 W yields a hole diameter of 100μm,depth of 156μm,and zero taper.The maximum scanning speed of the highspeed polygon mirror reaches 1000 m/s.Before processing,hole spacing,row spacing,and other related parameters were determined.A processing efficiency of 10000 holes per second is achieved.In addition,to increase the machining aperture,an optimized machining technology was proposed to correct the scanning position deviation of the polygon mirror during the scanning process.A final hole diameter of 150μm can be achieved using this method.In addition,this method is beneficial to biomaterial coatings and deposit drugs on the titanium alloy microhole substrates.