精密透镜系统的模型预测热控方法

Model Predictive Thermal Control Method for Precision Lens System

针对半导体光刻领域的超高精度热控需求,提出一种基于模型预测的热控方法。生成透镜系统的阶跃和伪随机热扰动输入信号。采用高精度测温系统测量透镜系统的温度响应数据,运用模型辨识方法获得透镜系统的热响应模型。通过滚动优化策略推导模型预测热控制律,并建立精密透镜系统的热控实验平台。热控实验结果表明,该热控方法具有收敛速度快、抗干扰能力强、精度高的优点,温控误差可控制在±8 mK内。热相差测试结果表明,该控制方法可抑制透镜系统的焦面漂移,适合应用在对温控精度要求较高的装备领域。

To mitigate the demand for ultrahigh precision thermal control in the field of semiconductor lithography,a thermal control method based on model prediction is proposed in this paper.The step and pseudorandom thermal disturbance input signals of a lens system are generated.The temperature response data of the lens system are obtained using a high precision temperaturemeasurement system,and the thermal response model of the lens system is obtained via the model identification method.The rolling optimization strategy is used to derive the model’s predictive thermal control law,and the precision lens system’s thermal control experimental platform is established.The thermal control experiment results show that the thermal control method has a fast convergence speed,strong antiinterference ability,high precision,and the temperature control error is controlled within±8 mK.The thermalphasedifference test results show that the control method successfully suppresses the lens system’s focal plane drift.Further,the method is suitable for application in the field of highend equipment with strict temperature control accuracy requirements.