基于Fano共振的全介质超表面传感器

All-Dielectric Metasurface Sensor Based on Fano Resonance

为了实现高灵敏度的双参量传感,设计了一种对称的全介电超表面结构。在超表面上涂覆气敏薄膜后,会产生标记为dip 1和dip 2的两个Fano共振峰,可用于同时测量折射率和气体体积分数。计算结果表明,dip 1的折射率灵敏度和气体体积分数灵敏度分别为1035 nm/RIU和-0.57 nm/%,dip 2的折射率灵敏度和气体体积分数灵敏度分别为543.6 nm/RIU和-0.87 nm/%。该传感器可用于双参量的高灵敏度测量,且这种对称结构得到的透射谱不受光源偏振角度的影响,提高了传感器对光源的适应性,为环境空间的检测提供了一种新方法。

In this paper, a symmetrical all-dielectric metasurface structure is designed to achieve a high-sensitivity dualparameter sensor. After coating a gas-sensitive thin film on the metasurface, two Fano resonance peaks labeled as dip 1and dip 2 are generated to measure the refractive index and gas volume fraction simultaneously. The calculation results show that the refractive index and gas volume fraction sensitivity of dip 1 are 1035 nm/RIU and-0. 57 nm/%,respectively, and the refractive index sensitivity and gas volume fraction sensitivity of dip 2 are 543. 6 nm/RIU and-0. 87 nm/%, respectively. The sensor can be used for high-sensitivity measurement of two parameters, and the transmission spectrum obtained using the symmetrical structure is not affected by the polarization angle of the light source,improving the adaptability of the sensor to the light source, and it provides a new method for detecting the environment.