单波长中红外穆勒矩阵椭偏仪的设计、定标与测试

Design,Calibration,and Measurement of Single Wavelength Mid-Infrared Mueller Matrix Ellipsometer

随着科学家对探测精度的要求不断提高,探测设备的偏振精度愈显重要。如何精确测量元件及系统的偏振特性以优化并提高设备的偏振测量精度是一个关键问题。设计并建立了一套中红外穆勒矩阵椭偏仪,在12.32μm波长下,使用非线性拟合法和双旋转法对系统进行了定标和测试比对。结果表明,该椭偏仪的穆勒矩阵测量精度优于0.02;透、反射样品的重复测量精度分别为0.01和0.02。该研究可为中红外穆勒矩阵椭偏仪的设计和应用提供借鉴。

As scientists'requirements for the polarization accuracy continue to increase,the polarization accuracy of detection equipment becomes more and more important.Therefore,how to accurately measure the polarization characteristics of components and systems in order to optimize and improve the polarization measurement accuracy of the equipment is a key issue.In this paper,a mid-infrared Mueller matrix ellipsometer is designed and established,and the system is calibrated and tested by using the non-linear fitting method and the dual-rotating method at 12.32μm wavelength.The results show that the measurement accuracy of the Mueller matrix of the ellipsometer is better than 0.02;the repeated measurement accuracy of the transmission sample and the reflection sample is 0.01 and 0.02,respectively.This study can provide reference for the design and application of mid-infrared Muller matrix ellipsometers.