底座自适应式压电陶瓷激振装置研究

Study on PZT Excitation Device with Self-adaptive Base Structure

针对压电陶瓷底座激励装置中可动底座结构的实现方式和微结构的安装可靠性问题进行了研究,设计了一种由上联接块、钢球和下联接块组成的点接触式可动底座结构,以及一种带有L型支撑臂的弹性支承件,制作了基于压电陶瓷的底座激励装置,搭建了MEMS微结构动态特性测试系统,对激励装置的激振性能进行了测试实验,也对3种典型微悬臂梁的动态特性进行了测试实验。研究结果表明:所设计的激励装置能够使底座结构进行自适应调节,微结构安装区域的变形量也被大幅降低了,激励带宽可达到90 kHz,具备良好的激振性能。

The realization method of the moveable base structure and the issue of the installation reliability for microstructures were studied. A point-contacted movable base structure composed of an upper connecting block, a steel ball and a lower connecting block was designed. An elastic support with L-shaped supporting arms was also designed. The base excitation device with PZT was fabricated. The dynamic measurement system for MEMS microstructures was developed. The excitation performance of the excitation device was tested. The dynamic characteristics of three typical microcantilevers were also tested. The results show that the base structure of the designed excitation device can be adaptively adjusted, and the deformation of the installation area for microstructures is greatly reduced. The excitation bandwidth of the excitation device can reach to 90 kHz. The excitation device has a good excitation performance.