摘要
阐述四种正凹蚀制作工艺的优缺点,分析不同材料、不同参数对凹蚀量的影响,并通过实验数据,得出一种具有参考意义的正凹蚀工艺流程和控制方法。
This paper introduces the advantages and disadvantages of four kinds of positive etching process,analyzes the influence of different materials and different parameters on the amount of etching,and through the experimental data,gives a kind of positive etching process and control method with reference significance.
作者
王德瑜
吉祥书
顾凯旋
WANG Deyu;JI Xiangshu;GU Kaixuan(Zhejiang Wanzheng Electronics Technology Co.,Ltd.,Zhejiang 314107,China)
出处
《集成电路应用》
2022年第9期24-25,共2页
Application of IC
关键词
控制技术
正凹蚀
玻纤蚀刻
等离子
去除沾污
control technology
positive concave
glass fiber etching
plasma
removal of drilling sewage