基于精益TRIZ理论的窄带滤光片产能提升方法

A Method to Improve the Productivity of Narrow Band Filters Based on Lean TRIZ Theory

基于精益TRIZ理论分析解决现有产能瓶颈。采用膜层厚度均匀性技术,通过新型工装设计提升窄带滤光片的产能。采用新型设计工装与修正掩膜板控制相结合的镀制工艺制备窄带滤光片。通过数据统计分析的方法,评估该工艺制备滤光片的测试数据,进而判断该技术的可行性。

Focuses on using lean TRIZ theory to analyze and solve the existing capacity shortage.By adopting the film thickness uniformity technology,a new typeof fixturewhich can improve the productivity of narrow-band filters was designed.Using this new fixture combined with the mask correction process,the narrow-band filters was manufactured.Though the method of statistical data analysis,the measured spectral data of these narrow-band filter were analyzed,and the result shows the capacity improvement method described in this paper is feasible.