基于电场驱动微3D打印的大高宽比微模具制造

Fabrication of Micro-mold with High Aspect Ratio Based on Electric-field-driven Microscale 3D Printing

微模具在微纳制造领域具有广泛应用,为了实现大高宽比微模具的低成本、简单化制作,提出一种基于电场驱动微3D打印及毛细力光刻的微模具制作方法。首先打印多层大高宽比微结构母模板,再将其结构特征转移至聚二甲基硅氧烷(PDMS)凹模具,最后再经过毛细力光刻过程制作大高宽比聚合物微模具。详细阐述了大高宽比微结构母模板的打印原理及聚合物微模具的制作原理,探究了打印工艺参数对微结构母模板形貌的影响规律。使用优化的打印参数制备了高宽比为5的微结构母模板,并复制出相应深宽比的PDMS凹模具。最终由PDMS凹模具复制的聚合物微模具不仅有着更大的高宽比,还可用于金属网格透明电极等元件的批量化制作。

Micro-molds had a wide range of applications in the field of micro-nano manufacturing.In order to realize the low-cost and simple fabrication of micro-molds with high aspect-ratio,a micro-mold fabrication method based on electric-field-driven microscale 3 D printing and capillary force lithography was proposed in this paper.Firstly,a multi-layers micro-structure master template with high aspect ratio was printed,then its structural features were transferred to a polydimethylsiloxane(PDMS)concave mold,and finally a polymer micro-mold with high aspect ratio was fabricated through a capillary force lithography process.The printing principle of the micro-structure master template with high aspect ratio and the fabrication principle of the polymer micro-mold were expounded,and the influence of the printing process parameters on the morphology of the micro-structure master template was explored.The micro-structure master template with a aspect ratio of 5 was made using optimized printing parameters,and the PDMS concave mold with corresponding aspect ratio was also copied.The final polymer micro-mold replicated by the PDMS concave mold not only had a higher aspect ratio,but could also be used for the fabrication of metal mesh transparent electrodes.