摘要
This paper presents the results of studies of the structure,microstructure,dependences of the piezoelectric properties on the electric field(dielectric hysteresis loops,reversible nonlinearity,deformation characteristics)and dielectric properties of the ceramic material PCR-13(based on the PZT system)in the temperature range 300-900K and frequencies of an alternating electric field(25÷2·10^(6))Hz.The character of the obtained dependences made it possible to attribute PCR-13 to ferro-hard materials.Using the HF cathodic sputtering method,PCR-13 thin films were fabricated on Si(001)substrates.It is shown that they are polycrystalline textured,while in comparison with bulk material,the film contains tensile stresses of the unit cell in the plane of the substrate and compresses in the perpendicular direction with the valueε_(33)=-0.018.The capacitance-voltage characteristics of the Al/PCR-13/Si/Al heterostructure were studied.The reasons for the revealed patterns are discussed.
基金
Research was financially supported by the Ministry of Science and Higher Education of the Russian Federation(State assignment in the field of scientific activity,Southern Federal University,2020)
Grant of Russian Foundation for Basic Research No.18-32-00552-mol-a(research of dielectric properties,reversible nonlinearity)
The work was performed as part of the state assignments of the SSC RAS(theme No state registration 01201354247).The equipment of the Center of Research Institute of Physics SFedU,“High-Tech”SFedU was used.
