摘要
随着第五代移动通信(5G)时代的到来,高频、大带宽的谐振器成为通信行业的迫切需求。该文设计制备了一款可实现高频超大带宽的横向激发体声波谐振器(XBAR)。该谐振器A1模式的谐振频率为5.81 GHz,机电耦合系数可达39.6%,Q-3 dB为248;A3模式的谐振频率高达17.04 GHz,机电耦合系数为7.0%。该谐振器A1和A3模式的频率温度漂移系数(TCF)分别为-72.6×10^(-6)/℃和-38.5×10^(-6)/℃。此外,该文还提出了一种新型叉指电极(IDT)结构,该结构可以抑制寄生模式,提升谐振器性能。
With the arrival of 5G communication era,the resonator with high-frequency and ultra wide-bandwith has become an urgent demand of the communication industry.In this paper,a laterally excited bulk acoustic wave resonator(XBAR)with high frequency and ultra wide-bandwidth is designed and fabricated.The resonance frequency of the A1 mode resonator is 5.81 GHz,electromechanical coupling coefficient is up to 39.6%and a Q-3 dB value is 248,and the A3 mode shows a resonance frequency of 17.04 GHz and electromechanical coupling coefficient of 7.0%.The measured temperature coefficient of frequency(TCF)of the A1 and A3 modes of the resonator are-72.6×10^(-6)/℃and-38.5×10^(-6)/℃,respectively.In addition,a new interdigital electrode(IDT)structure is proposed in this paper,which can suppress the spurious mode and greatly improve the performance of the resonator.
作者
俞振一
郭瑜
傅肃磊
苏荣宣
李百川
张帅
徐惠平
潘峰
王为标
YU Zhenyi;GUO Yu;FU Sulei;SU Rongxuan;LI Baichuan;ZHANG Shuai;XU Huiping;PAN Feng;WANG Weibiao(School of Internet of Things Engineering,Jiangnan University,Wuxi 214122,China;Shoulder Electronics Co.,Ltd.,Wuxi 214124,China;School of Materials Science and Engineering,Tsinghua University,Beijing 100084,China;College of Information,Mechanical and Electrical Engineering,Shanghai Normal University,Shanghai 200234,China)
出处
《压电与声光》
CAS
北大核心
2022年第5期700-703,共4页
Piezoelectrics & Acoustooptics
基金
国家重点研发计划资助项目(2020YFB0408900)
国家自然科学基金资助项目(52002205)。
关键词
XBAR谐振器
高频率
超大带宽
5G通信
寄生模式
XBAR resonator
high frequency
ultra wide-bandwidth
5G communication
spurious mode
