准原位透射电镜样品气体处理系统的研制及应用

Development and application of quasi in⁃situ gas treatment system for transmission electron microscope samples

环境气氛对材料结构与性能的影响是材料领域关注的重要问题。透射电子显微镜是研究材料微观组织结构的重要仪器,目前通过高成本改造电镜腔室可引入气体,但为保证电镜正常工作和仪器的分辨率,可通入气体种类少,腔室气体压力低;原位气氛样品杆操作难度高、安全系数低、耗材昂贵。本文针对上述问题,研制了一种可以直接插入透射电镜样品杆的气体处理系统及其应用,实现了易于从环境气氛实验向透射电镜观察迁移的准原位功能,它采用不锈钢材质加工而成的真空腔室,可通入更高气压、更多种类的气体,实现样品处理多样化,节省透射电镜使用机时,扩宽了对材料与气体相互作用的研究范围。

The effect of ambient atmosphere on the structure and property of a material is an important issue in the field of materials.Transmission electron microscope(TEM)is an important instrument for studying the microstructures of materials.Moreover,gas can be introduced into TEM by modifying TEM chamber to realize the study on the relation between reactive gas and material structures.However,to maintain the high⁃resolution of TEM,the gas that allowed to be introduced into TEM chamber is limited with relatively lower gas pressure.In addition,In⁃situ atmosphere sample holders are difficult to be operated and have the security problems.For the above⁃mentioned issues,this work develops a gas treatment system that is assembled into TEM chamber.TEM holders can be directly inserted into the gas treatment system,realizing the quasi in⁃situ study.The designed system can introduce varied types of gas with relatively high gas pressures,which can realize diverse sample treatments and save TEM machine⁃hours.This new system can broaden the study on the interaction between materials and reactive gases.