脉冲叠加直流激励辉光放电特性

Characteristics of pulse superimposed DC excitation glow discharge

辉光放电产生的低温等离子体具有广泛的应用前景,日益成为研究热点。本文提出了一种采用脉冲叠加直流的方式来激励辉光放电的实验装置。选取氩气作为反应气体,本实验在低气压下进行,利用参数可调的高频脉冲电源和直流电源进行激励。研究了不同激励方式下击穿电压和电流的变化规律。实验发现:直流辉光放电击穿电压最低,约为380 V,但是在放电过程中放电管发热比较严重;脉冲辉光放电所需击穿电压为450~600 V,但其存在反复击穿;而脉冲叠加直流激励辉光放电则降低了脉冲击穿电压,最低约为400 V,且改善了放电管发热严重的问题。

The low-temperature plasma produced by glow discharge has broad application prospects and is increasingly becoming a research hotspot.In this paper,an experimental device for exciting glow discharges by means of pulsed superimposed DC is proposed.Argon gas is selected as the reaction gas,the experimental environment is low pressure,and the parameter adjustable high-frequency pulse power supply and DC power supply are used for excitation.The changes of breakdown voltage and current under different excitation methods are studied.The experiments results show that the breakdown voltage of DC glow discharge is the lowest,about 380 V.But the discharge tube generates a lot of heat during the discharge process.The breakdown voltage required for pulsed glow discharge is 450~600 V,while pulse superimposed DC excitation glow Discharge reduces the pulse breakdown voltage,the lowest is about 400 V,and improves the serious heating problem of the discharge tube.