基于红外激光干涉仪的非球面面形测试技术研究

Aspheric Surface Measurement Based on Infrared Laser Interferometer

本文提出了一种基于红外激光干涉仪检测非球面面形的新方法,分为3个步骤:首先,利用红外激光干涉仪测量分析出非球面与标准球面之间的波像差;然后,根据非球面方程得出非球面与标准球面之间波像差的理论值;最后通过计算得出非球面的面形偏差。为验证这一方法的正确性和可靠性,采用ZYGO可见光干涉仪,使用补偿镜法测量了同一块抛物面反射镜的面形误差。结果表明,两种测量方法结果吻合。本新方法方便快捷,具有较强的通用性,可以用于非球面在加工过程中的面形测试。

Here,a novel method for measuring an aspheric surface using an infrared laser interferometer is proposed.The model is divided into three modules.First,the wave front aberration between the aspheric surface and the standard spherical surface was measured by an infrared laser interferometer.Then,the theoretical value of the wave image difference between the aspheric surface and the standard spherical surface was calculated according to the aspheric equation.Finally,the surface shape deviation of the aspheric surface was calculated.To verify the validity and reliability of this method,the surface shape error of the same paraboloidal mirror was measured using the ZYGO visible light interferometer and the compensation mirror method.The obtained results indicate that these two measurement methods were identical.Hence,the novel method is convenient,fast,and highly versatile and can be used to test aspheric surfaces during processing.