同轴集成式宏微驱动器宏动结构的优化设计

Optimization Design of Macro-Motion Structure of Coaxial Integrated Macro-Micro Actuator

以同轴集成式宏微驱动器为对象,以减小其宏动力波动值为目标,在建立其数学模型的基础上,采用COMSOL软件对其结构参数进行优化。通过仿真不同宏动位置时宏动力输出情况,得到5个不同参数对该驱动器宏动力稳定性的影响程度。利用正交试验方法设计出最佳的优化方案,并进行试验验证。结果表明:5个因素对宏微驱动器稳定性影响的强弱程度依次为永磁体厚度d_(y)、宏动线圈厚度d_(x)、气隙大小q、宏动线圈长度L_(x)、永磁体长度L_(y);当d_(y)=4.5 mm、L_(y)=138 mm、q=5 mm、d_(x)=5 mm、L_(x)=107 mm时,宏微驱动器的输出性能最佳。

In order to reduce the macro dynamic fluctuation value of the coaxial integrated macro-micro actuator,the structure parameters of the actuator were optimized by using COMSOL software on the basis of establishing its mathematical model.By simulating the output macro dynamic at different macro dynamic positions,the effects of five different parameters on the macro dynamic stability of the actuator were obtained.The best optimization scheme was designed through the orthogonal experiment and experimental verification was done.The results show that the five factors affecting the stability of macro-micro actuator from strong to weak are permanent magnet thickness d_(y),macro coil thickness d_(x),air gap q,macro coil length L_(x),permanent magnet length L_(y);when d_(y)=4.5 mm,L_(y)=138 mm,q=5 mm,d_(x)=5 mm,L_(x)=107 mm,the output performance of macro-micro actuator is the best.