微细电解加工恒精度变参数采样算法

Constant precision and variable parameter sampling algorithm for electrochemical micromachining

针对微细电解加工使用传统宏观插补算法难以满足亚微米加工精度要求的问题,提出一种实现恒精度控制的变参数采样插补算法。通过对加工轴向偏差的在线测算,实时调控数据采样增量,优化刀具轨迹。引入精度控制系数实现参数曲线加工恒精度控制。利用MATLAB对算法加工轴向偏差和形状误差进行仿真,当精度控制系数k=1时,形状误差约为脉冲当量的0.69倍。基于该算法开展微结构电解加工实验,获得亚微米级加工精度。算法无需预存代码,根据加工状态在线求解机床运动,能够满足微细特种加工技术高精度加工需求。

In order to solve the problem that it is difficult to obtain sub-micron machining accuracy using traditional macro-interpolation algorithms in electrochemical micromachining,a variable-parameter sampling interpolation algorithm for constant-precision control is proposed.The data sampling increment is controlled in real time and the tool path is optimized by online measurement of the machining axial deviation.The precision control coefficient is introduced to realize constant precision control of parametric curve machining.The machining axial deviation and shape error of the algorithm are simulated by MATLAB.When the precision control coefficient k=1,the shape error is about 0.69 times of the pulse equivalent.The microstructure electromachining experiment was carried out using the algorithm and the sub-micron machining accuracy was obtained.The algorithm solves the machine tool motion online according to the machining state without pre-stored code,which can meet the highprecision machining requirements of special micromachining technology.