摘要
目前,光学检查设备AOI已经成为TFT-LCD行业主要的微观缺陷检查设备,并大量应用到各工艺检查单元。随着全球面板产业竞争的加剧,产线和产品的智能化、高效化需求日渐剧增,但各个工序的检测设备维度往往不唯一,这为设备间数据的流通和统一造成障碍,为解决此类问题,该文基于JMP的数据预测和分析功能,对设备参数进行优化和重新设计,并对新参数进行ROC验证,验证结果达到预期。同时为Cell自动化监控和反馈机制的建立提供理论和数据支持。
At present, the automatic optical inspection(AOI) equipmen thas become the main micro defect inspection equipment in the TFT-LCD industry, and is widely used in various process inspection units. With the increased competition in the global panel industry, the demand for intelligent and efficient production lines and products is increasing sharply.However, the dimension of testing equipment in each process is often not unique, which creates obstacles for the flow and unification of data between equipment, so as to solve such problems. Based on the data prediction and analysis function of JMP, the equipment parameters are optimized and redesigned, and the new parameters are verified by ROC. The verification results meet the expectations. At the same time, this paper provides theoretical and data support for the establishment of cell automatic monitoring and feedback mechanism.
出处
《科技创新与应用》
2022年第34期55-58,共4页
Technology Innovation and Application
