摘要
提出了一种基于聚苯硫醚(PPS)薄膜的高灵敏度光纤声波传感器,利用PPS薄膜和光纤端面构建法布里—珀罗(F-P)腔,通过PPS薄膜受压形变调制F-P腔长,实现高效声光换能。传感PPS薄膜形变灵敏度可达66.11 nm/Pa。采用功率解调方法,实现了50 Hz~20 kHz频率范围内声波探测,灵敏度高达549.8 mV/Pa,信噪比达57 dB,最小可探测声压为28 dB。
A high sensitivity optical fiber acoustic wave sensor based on polyphenylene sulfide(PPS)film is proposed.Fabry-Perot(F-P)cavity is constructed by the PPS film and optical fiber end face.To achieve high efficient acoustic and optical energy conversion, the length of F-P cavity is modulated by compressive deformation of the PPS film.The deformation sensitivity of the sensing PPS diaphragm is up to 66.11 nm/Pa.By using the power demodulation method, acoustic wave detection is achieved in the frequency range of 50 Hz~20 kHz, the sensitivity of the sensor is up to 549.8 mV/Pa, with a signal to noise ratio of 57 dB,and the minimum detectable sound pressure of the sensor is 28 dB.
作者
刘理
徐来
毛莉莉
劳泽锋
曾伟
LIU Li;XU Lai;MAO Lili;LAO Zefeng;ZENG Wei(School of Optical and Electronic Information,Huazhong University of Science and Technology,Wuhan 430074,China;Jiangsu Etern Co Ltd,Suzhou 215211,China;School of Electronic Information Engineering,Jiujiang University,Jiujiang 332005,China)
出处
《传感器与微系统》
CSCD
北大核心
2022年第12期19-21,25,共4页
Transducer and Microsystem Technologies
基金
江西省自然科学基金资助项目(20202BABL201024)
江西省教育厅科技项目(GJJ190932)。
关键词
光纤传感
法布里—珀罗干涉仪
声波传感器
复合薄膜
optical fiber sensing
Fabry-Perot(F-P)interferometer
acoustic wave sensor
composite film