利用先进微加工技术和薄膜材料实现电可调射频器件

Enabling electrically tunable radio frequency components with advanced microfabrication and thin film techniques

多功能、多频段、高性价比、小型化的可重构射频器件在现代无线通信系统有着广泛应用,在未来也有极大的需求。本文介绍了基于先进薄膜材料和微加工技术设计制备的多频段、可重构射频器件。对表面微加工和体微加工技术等制造工艺的射频应用,特别是在射频微机电系统和电可调射频器件中的应用着重进行了探讨。此外,本文还综述了利用铁电和铁磁薄膜材料集成设计制备的连续可调、小型化、高性能射频器件,探讨了利用纳米图案结构工艺来增强铁磁薄膜的高频性能(例如:铁磁共振频率和损耗)的设计方法和策略,并示范了基于此实现的全电学可调的射频器件。

Multi-function,multiband,cost-effective,miniaturized reconfigurable radio frequency(RF)components are highly demanded in modern and future wireless communication systems.This paper discusses the needs and implementation of multiband reconfigurable RF components with microfabrication techniques and advanced materials.RF applications of fabrication methods such as surface and bulk micromachining techniques are reviewed,especially on the development of RF microelectromechanical systems(MEMS)and other tunable components.Works on the application of ferroelectric and ferromagnetic materials are investigated,which enables RF components with continuous tunability,reduced size,and enhanced performance.Methods and strategies with nano-patterning to improve high frequency characteristics of ferromagnetic thin film(e.g.,ferromagnetic resonance frequency and losses)and their applications on the development of fully electrically tunable RF components are fully demonstrated.