衬底对飞秒激光脉冲照射后薄金属目标光热响应的影响

Impact of substrate on opto-thermal response of thin metallic targets under irradiation with femtosecond laser pulses

飞秒脉冲激光器由于其在微、纳米尺度上图案制造精确的能力,在过去的几十年里得到了广泛的应用。对于高效材料加工,一个关键问题是确定在实验装置中使用的激光参数,而在已进行的系统研究中,主要是强调独立的单个参数的影响,很少关注辐照的固体基底材料的作用。因此,本研究强调了衬底对不同厚度薄膜的影响,结果表明,衬底的光学和热物理性质都对辐照薄膜上的热指纹有影响,在较小的薄膜尺寸下影响较大。选择了两种代表性材料硅和熔融硅作为不同光学和热物理形态薄膜(金和镍)的典型衬底,并对辐照的固体热响应和损伤阈值进行评估,为基于激光的制备装置和工艺的设计提供指导。

Femtosecond pulsed lasers have been widely used over the past decades due to their capability to fabricate precise patterns at the micro-and nano-lengths scales. A key issue for efficient material processing is the determination of the laser parameters used in the experimental set ups. Despite a systematic investigation that has been performed to highlight the impact of every parameter independently, little attention has been drawn on the role of the substrate material on which the irradiated solid is placed. In this work, the influence of the substrate is emphasised for films of various thicknesses, which demonstrates that both the optical and thermophysical properties of the substrate affect the thermal fingerprint on the irradiated film while the impact is manifested to be higher at smaller film sizes. Two representative materials, silicon and fused silica, have been selected as typical substrates for thin films(gold and nickel) of different optical and thermophysical behaviour and the thermal response and damage thresholds are evaluated for the irradiated solids. The pronounced influence of the substrate is aimed to pave the way for new and more optimised designs of laserbased fabrication set ups and processing schemes.