不同类型石英玻璃的振动能量损耗特性对比分析

Comparative Analysis of Mechanical Energy Loss in Different Types of Silica Glass

石英玻璃相对于金属、晶体、陶瓷等大多数固体材料具有更小的机械振动能量损耗,是许多精密测量器件的首选材料。本文测试对比了四种类型(Ⅰ类、Ⅱ类、Ⅲ类和Ⅳ类)石英玻璃的振动能量损耗特性,从材料化学组分和结构缺陷方面分析了石英玻璃本征损耗的影响因素及作用机理。结果表明:Ⅰ类和Ⅱ类石英玻璃的本征损耗显著大于Ⅲ类和Ⅳ类石英玻璃,主要是由金属杂质含量高和气泡等级低造成的;羟基含量不是影响石英玻璃本征损耗的主要因素;表面损耗是石英玻璃器件振动能量损耗的主要来源之一,可以通过湿法刻蚀消除。

Compared with most solid materials such as metal,crystal and ceramics,silica glass has lower mechanical energy loss and it is the preferred material for many precision measuring devices.In this paper,the mechanical energy loss of four types of silica glass(Ⅰ,Ⅱ,ⅢandⅣ)were tested and compared.The influence factors and mechanism of intrinsic loss of silica glass were analyzed from material chemical composition and structural defects.The results show that the intrinsic losses of typeⅠand typeⅡsilica glass are significantly higher than that of typeⅢand typeⅣsilica glass.The main reasons are the high content of metal impurities and low bubble grade.Hydroxyl content is not the main factor that has significant impact on the intrinsic loss of silica glass.Surface loss is one of the main sources of mechanical energy loss of silica glass devices,and wet etching is an effective method to eliminate the surface loss.