扭转效应下石英晶片电荷量及其灵敏度分布规律研究

Research on the Distribution of Charge and Sensitivity of Quartz Wafer Under Torsion Effect

针对石英晶体在扭转、复合变形等三维复合压电效应还没有建立起完整的压电效应理论体系,在扭转效应下如何确定检测电极的分布位置使电荷灵敏度达到最大的研究较少。文章通过研究扭转测量晶组的组成,采用分割电极法将检测电极布置到最大灵敏度方向,实现对不同扭矩作用下电荷量的实验测量并分析测量误差,而通过对扭转电荷灵敏度分布规律的理论计算与实验分析确定检测电极布置的最大灵敏度方向。实验结果说明,石英晶片在扭转效应下电极电荷量与扭矩成线形关系,当电极分割线须与坐标系的y轴重合时扭转电荷灵敏度最大,该研究将为设计新型扭矩传感器检测电极的位置确定提供理论基础。

At present,a complete theoretical system of piezoelectric effect has not been established for the threedimensional composite piezoelectric effects of quartz crystal such as torsion and composite deformation.How to determine the distribution position of the detection electrode to maximize the charge sensitivity under the torsion effect is a lack of research.In the paper,by studying the composition of the twist measuring crystal group,the detection electrode is arranged in the maximum sensitivity direction by using the split electrode method to realize the experimental measurement of the amount of charge under different torques and analyze the measurement error,while the maximum sensitivity direction of the detection electrode arrangement is determined by theoretical calculation and experimental analysis of the distribution law of torsional charge sensitivity.The experimental results show that the electrode charge of quartz wafer has a linear relationship with the torque under the torsional effect.When the electrode division line must coincide with the Y-axis of the coordinate system,the torsional charge sensitivity is the largest.The research will provide a theoretical basis for the design of a new torque sensor to determine the position of the detection electrode.