电子级三氯化硼充装系统中新型尾气处理装置

Novel Tail Gas Treatment Device in Electronic Grade Boron Trichloride Filling System

针对电子级三氯化硼充装时面临的轻组分含量偏高及尾气处理时产生的盐酸浓度低、无法回收等问题,对电子级三氯化硼充装系统中的尾气处理装置进行了优化。优化后的新型尾气处理装置不仅使充装系统管道内的气体置换更加彻底、提升了电子级三氯化硼品质,还实现副产盐酸和硼酸的分离与回收,使盐酸浓度从12%提升至31%,达到工业盐酸的标准。

In order to solve the problems of high content of light components in electronic boron trichloride filling system and low concentration of hydrochloric acid in tail gas treatment,the tail gas treatment device in electronic boron trichloride filling system was optimized.After optimization,the new tail gas treatment device not only makes the gas replacement more thorough,improving the quality of electronic grade boron trichloride,but also realizes the separation and the recovery of by-product of hydrochloric acid and boric acid,making the concentration of hydrochloric acid increase from 12%to 31%,meeting industry standards.