摘要
基于金刚石量子精密测量技术的扫描氮-空位显微镜(SNVM)近年来发展十分迅速,广泛应用于磁性材料,生物成像等领域。其中,作为原子级大小的感测单元,氮-空位色心探针和样品之间的距离是影响SNVM成像空间分辨率的重要因素,也是准确重构扫描成像物理量的必要条件。本文提出一种导线标准样品及测量方法,用于确定氮-空位色心探针与样品间距。首先使用电子束光刻及镀膜等微纳加工技术实现百纳米线宽的导线标准样品的制备,其次在自行搭建的扫描氮-空位显微镜平台上实现标准样品中电流产生磁场的扫描成像,之后使用理论公式对磁场成像结果进行拟合分析得到氮-空位色心探针-样品间距,最后对该方法的精度及空间分辨率进行讨论。
Scanning nitrogen-vacancy microscope(SNVM) based on diamond quantum precision measurement technology has developed rapidly in recent years and is widely used in magnetic materials,biological imaging and other fields.Among them,as an atomic-scale sensing unit,the distance between the nitrogen-vacancy single spin and the sample is an important factor that affects the spatial resolution of SNVM imaging,and it is also a necessary condition for accurate reconstruction of the physical quantity of scanning imaging.We proposed a current standard sample and measurement method to determine the distance between the nitrogen-vacancy single spin and the sample.First,electron beam lithography and coating and other micro-nano processing technologies were used to realize the preparation of current standard samples with a line width of one hundred nanometers.Secondly,the scanning imaging of the magnetic field generated by the current were realized in the standard samples on the self-built scanning nitrogen-vacancy microscope platform.By performing the theoretical formula fitting analysis of the scanning imaging result,the nitrogen-vacancy single spin-sample distance was obtained,and finally the accuracy and spatial resolution of the method were discussed.
作者
金子建
程智
陈宇航
王鹏飞
JIN Zi-jian;CHENG Zhi;CHEN Yu-hang;WANG Peng-fei(Department of Precision Machinery and Precision Instrumentation,University of Science and Technology of China,Hefei Anhui 230026;CAS Key Laboratory of Microscale Magnetic Resonance and School of Physical Sciences,University of Science and Technology of China,Hefei Anhui 230026;CAS Center for Excellence in Quantum Information and Quantum Physics,University of Science and Technology of China,Hefei Anhui 230026,China)
出处
《电子显微学报》
CAS
CSCD
北大核心
2022年第6期634-641,共8页
Journal of Chinese Electron Microscopy Society
基金
国家重点研发计划项目(No.YFF01012500)
国家自然科学基金资助项目(No.81788101)
安徽省量子信息技术研究计划(No.AHY050000)。