摘要
简要介绍了氦质谱检漏仪的工作原理以及不同类型的金属波纹管。在氦质谱检漏时,针对不同波纹管的特点,探究了单层薄壁波纹管、多层金属波纹管、大直径金属波纹管等的特定检测方法。
The working principle of helium mass spectrometry leak detector and different types of metal bellows are briefly introduced.According to the characteristics of different bellows,specific detection methods of single-layer,thin-wall bellows,multi-layer metal bellows and large-diameter metal bellows are explored in helium mass spectrometry.
作者
张博
宋林红
钱江
张文良
张全厚
曹月秋
ZHANG Bo;SONG Lin-hong;QIAN Jiang;ZHANG Wen-liang;ZHANG Quan-hou;CAO Yue-qiu(Shenyang Academy of Instrumentation Sciences Co.,Ltd.,Shenyang 110000,Liaoning,China;Anshan Solenoid Valve Co.,Ltd.,Anshan 114300,Liaoning,China)
出处
《阀门》
2022年第6期478-480,共3页
VALVE MAGAZINE
关键词
氦质谱检漏仪
金属波纹管
试验工装
helium mass spectrometer leak detector
metal bellows
test tooling
