半导体金属氧化物式氢气传感器的研究进展

The Development of Semiconducting Metal Oxide Hydrogen Sensors

在各种类型的氢气传感器中,化学电阻传感器由于其结构简单和低成本而成为最有应用前景的氢气传感器之一,而其中半导体金属氧化物材料(SMO)传感器由于表现出高稳定性、快速响应、易于制造等特点,近年来得到了广泛的研究。本文介绍了金属氧化物半导体式氢气传感器的传感机制,从纯SMO基材料、催化剂掺杂SMO基材料和SMO基复合材料等改性材料研究中总结出敏感响应性与纳米结构、表面化学和电子性能的相关性,最后简要讨论了金属氧化物半导体氢敏材料及传感器的研究难点及研发方向。

Among various types of hydrogen sensors, the chemiresistive sensor is one of the most promising hydrogen sensors due to its simplicity and low cost.Among them, semiconducting metal oxide materials(SMOs) and sensors have been widely studied in recent years due to their high stability, fast response,and easy fabrication.Discuss the sensing mechanism of metal oxide semiconducting hydrogen sensor,From the development of modified materials such as SMO-based materials, catalyst-doped SMO-based materials, and SMO-based composites, the correlations of sensitive responsiveness with nanostructure, surface chemistry, and electronic properties are summarized.Finally,the research difficulties and research directions of metal-oxide-semiconducting hydrogen-sensing materials and sensors are briefly discussed.