硅基底增透膜典型自然环境适应性评价研究

Assessment on Environmental Adaptability of Antireflective Films on Silicon in Typical Natural Environment

目的掌握硅基底增透膜在自然环境中的环境适应性。方法采用棚下暴露试验方法,开展硅基底增透膜样品自然环境试验。以0.5、1、1.5、2 a为检测周期,测试样品外观形貌、微观形貌、光谱透射比和表面化学成分等性能,根据性能随试验时间和试验环境的退化规律来对硅基底增透膜的环境适应性进行评价。结果经过0.5 a的湿热雨林(版纳站)、暖湿酸雨(江津站)、寒冷(漠河站)、南海岛礁(永兴岛站)气候环境试验,硅基底增透膜光谱透射比出现少量下降,表面部分区域出现了明显的变色和脱膜,样品已失效。随着试验时间的延长,变色和脱膜区域变多、变大,光谱透射比出现明显下降,尤其是经过2 a南海岛礁气候环境试验后,光谱透射比下降了80%左右。结论对各性能参数进行比较,硅基底增透膜在南海岛礁气候环境中的环境适应性最差,其次是暖湿酸雨气候环境,再次是湿热雨林气候环境,相对好一点的是寒冷气候环境。

The work aims to know the environmental adaptability of antireflective films on silicon in natural environment.The exposure test method under shed was used to conduct natural environment test of antireflective films on silicon.The appearance,micro morphology,spectral transmittance and surface chemical composition of the samples were tested according to the cycle of 0.5 year,1 year,1.5 years and 2 years.The environmental adaptability of antireflective films on silicon was evaluated according to the degradation law of performance with test time and test environment.After 0.5 year of environment tests in humid and hot rain forest(Banna Station),warm and humid acid rain(Jiangjin Station),cold(Mohe Station)and island-reef climate of the South China Sea(Yongxing Island Station),the spectral transmittance of antireflective films on silicon decreased a little,there were obvious discoloration and film removal in some areas of the surface,the sample failed.With the extension of test time,the discoloration and film removal areas became larger and larger,and the spectral transmittance decreased significantly,in particular,the spectral transmittance decreased by about 80% after environment test of 2 years in the island-reef climate of the South China Sea.According to comparison of performance parameters,it is concluded that the island-reef climate of the South China Sea makes antireflective films on silicon have the worst environmental adaptability,followed by the warm and humid acid rain climate,and then the humid and hot rainforest climate.The environmental adaptability of antireflective films on silicon is relatively good in the cold climate.