微结构化柔性压力传感器的性能增强机制、实现方法与应用优势

Performance Enhancing Mechanism,Implementation and Practical Advantages of Microstructured Flexible Pressure Sensors

柔性压力传感器具有易共形、高灵敏、快响应等特点,是发展物联网、可穿戴电子、触觉人工智能等领域的关键核心器件。通过敏感功能材料开发、功能层微结构设计、微纳制造方法优化等策略,可提升柔性压力传感器的综合性能,扩张其应用场景。其中,功能层微结构的创新设计被普遍认为是增强柔性传感器性能最有效的手段之一。本文综述了近年来基于微结构化的柔性压力传感器的最新研究进展,围绕微结构对于柔性压力传感器性能增强的机制、微结构的设计与实现方法以及微结构化柔性压力传感器在人机交互、医疗健康等领域的应用等方面进行详细阐述,并在此基础上对其未来发展方向进行展望。

The flexible pressure sensor with high flexibility,easy conformality,high sensitivity and fast response is a novel flexible electronic device.It is also the critical device for the development of tactile artificial intelligence,internet of things,wearable electronics and relative technologies.The strategies based on development of sensitive functional materials,device structure design and construction,and optimization of fabrication methods have been widely used to improve the comprehensive performance of flexible pressure sensors.Among them,utilizing the microstructure of functional layer of flexible pressure sensor to enhance its performance is generally considered to be one of the most effective ways.In this paper,the latest research progress of microstructured flexible pressure sensors in recent years is summarized.It mainly focuses on the performance enhancement mechanism of microstructured flexible pressure sensor,microstructure construction and fabrication methods,new sensitive functional materials,as well as its applications in human-machine interaction,medical and health and other relative fields.Finally,the future development of microstructured flexible pressure sensor is prospected.