基于MEMS技术的甲烷催化燃烧传感器研究进展

Research progress of methane catalytic combustion sensor based on MEMS technology

催化燃烧式甲烷传感器是目前煤矿中使用最普遍的传感器。催化燃烧式气体传感器制作技术简单,成本低廉,对甲烷气体的检测有较高的准确度和灵敏度,但目前传统的催化燃烧式气体传感器一般由手工制作而成,存在配对难、一致性差、功耗高等缺点。随着智能物联网和硅体微加工技术的发展,微电子机械系统(MEMS)技术日益成熟,与传统传感器相比,它具有体积小、重量轻、成本低、功耗低、稳定性好和易于实现自动化批量生产等优点。许多研究学者开始研发和设计基于MEMS技术的可燃气体催化燃烧式传感器,并在传感器微结构体制作工艺与材料方面取得突破。

Catalytic combustion methane sensor is the most widely used sensor in coal mines. The catalytic combustion gas sensor has the advantages of simple manufacturing technology, low cost, and high accuracy and sensitivity for the detection of methane gas. However, the traditional catalytic combustion gas sensor is made by hand, resulting in difficult matching,poor consistency and high power consumption. With the development of intelligent internet of things and silicon micromachining technology,microelectromechanical system(MEMS) has becomes more mature. Compared with traditional sensors, it has the characteristics of small volume, light weight, low cost, low power consumption, good stability and automatic mass production. Many researchers began to develop and design combustible gas catalytic combustion sensor based on MEMS technology, and have made progress in the fabrication process and materials of sensor microstructure.