摘要
节能是促进微电子工业发展的重要推手。本文从“空调方案、设备选择和余热利用”方面介绍了一些实例,漫谈了些许经验。就空调方案、通风系统和设备的合理选择,微电子工业洁净厂房的冷热源综合利用等问题,以工程实践成效为线索给出了一些节能建议。
Energy conservation is becoming an important driving force to promote the development of microelectronics industry. This paper presents some examples and talks about some experience from the aspects of air conditioning schemes, device selection and waste heat utilization. Regarding the reasonable selection of air conditioning system, ventilation system and equipment, and the comprehensive utilization of cold and heat sources in the cleanrooms of microelectronics industry, some energy conservation suggestions are provided based on engineering practice effects.
作者
涂有
涂光备
Tu You;Tu Guangbei(Tianjin Renai College,Tianjin;Tianjin University,Tianjin)
出处
《暖通空调》
2023年第1期25-33,共9页
Heating Ventilating & Air Conditioning
关键词
微电子工业
洁净室
节能
风机过滤单元
免费取冷
microelectronics industry
cleanroom
energy conservation
fan filter unit(FFU)
free cooling