差动式三平动柔顺定位平台优化设计及分析

Optimal Design and Analysis of Differential Displacement Three-Degree-ofFreedom Flexible Micro-Positioning Platform

基于差动式杠杆原理设计了一种多级柔顺放大铰链,并通过正交方式装配一种具有三个平动自由度的微定位平台,形成的对称闭环结构具有抗冲击、无累计误差和较好的各向同性的特点。材料采用7075铝合金,堆栈式压电陶瓷作为驱动装置提供输入位移。结合路径搜索法和静力学矩阵法,得出了机构的静力平衡方程和几何变形方程;对结构参数进行了敏感性分析,以位移放大比为目标,对机构中敏感度较高的参数进行了优化;对装配体进行了有限元分析。结果表明,行程可以达到391.42μm,放大倍数为13.05,平台具有较大的位移放大比和良好的定位精度。

Based on the differential lever principle, a multi-stage compliant magnifying hinge was designed, and a micro-positioning platform with three translational degrees of freedom was assembled in an orthogonal way, and the symmetrical closedloop structure formed has the characteristics of shock resistance, no cumulative error and better isotropy. The material is 7075aluminum, and the stacked piezoelectric ceramics were used as the driving device to provide input displacement. Combined with the path search method and the static matrix method, the static balance equation and geometric deformation equation of the mechanism were obtained;the sensitivity analysis of the structural parameters was carried out, and the parameters with higher sensitivity in the mechanism are optimized with the displacement amplification ratio as the goal;a finite element analysis was performed on the assembly. The results shows that the stroke can reach 391.42 μm and the magnification is 13.05, and the platform has a high displacement magnification ratio and good positioning accuracy.