摘要
双聚焦磁质谱仪由磁分析器和静电分析器组成,可实现方向和能量双聚焦,具有较高的分辨本领。本文利用离子光学仿真软件对双聚焦磁质谱仪中离子轨迹进行了仿真,将仿真得到的离子束像宽和分辨率与理论值对比,探究了离子入射条件对聚焦特性的影响,并根据仿真结果对离子源输出的的离子束状态提出了设计要求。
Double focusing magnetic mass spectrometer has high resolution by properly combining a magnetic analyzer and an electrostatic analyzer to achieve focusing of direction and energy. In this paper, the simulation software for ion optics was used to simulate the ion trajectory in the double focusing magnetic mass spectrometer. The image width and the resolution obtained by the simulation were compared with the theoretical values, and the influence of the ion initial state on the focusing characteristics was investigated. The simulation results were used to evaluate the resolution of the double focusing mass spectrometer and get requirements for the ion beam generated by the ion source.
作者
刘畅
肖梅
张晓兵
康学军
任正宜
董猛
郭美如
LIU Chang;XIAO Mei;ZHANG Xiaobing;KANG Xuejun;REN Zhengyi;DONG Meng;GUO Meiru(Southeast University,Nanjing 210096,China;Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2022年第11期822-827,共6页
Chinese Journal of Vacuum Science and Technology
关键词
双聚焦磁质谱仪
仿真
高分辨率
离子源
Double focusing magnetic mass spectrometer
Simulation
High resolution
Ion source