扫描电子显微镜样品的制备

Preparation of Scanning Electron Microscopy Samples

扫描子显微电镜是一种能够直接观察块状、薄膜或粉末颗粒等样品表面形貌的电子光学仪器,具有景深大、分辨率高、扫描图像富有立体感等特点,是进行微观结构研究的有力工具之一。影响样品图像质量的相关因素众多,其中样品制备技术是影响样品表面形貌观察和图像分辨率的重要因素之一。在样品制备时,应根据样品的分析要求以及形状选择合适的制备方法,同时根据其导电性选择是否在样品表面喷镀导电层,从而保证在电镜观察时能够获得高质量的样品表面微观结构图像。

The scanning electron microscope(SEM)is an electronic optical instrument that can directly observe the surface morphology of samples such as blocks,films or powder particles.It has the characteristics of large depth of field,high resolution,and three-dimensional scanning images.However,there are many related factors that affect the image quality of the sample,and the sample preparation technology is one of the important factors affecting the observation of the surface morphology of the sample and the image resolution.During sample preparation,an appropriate preparation method should be selected according to the analysis requirements of the sample and the shape of sample,and whether a conductive layer on the surface of the sample is sprayed or not based on the conductivity of the sample,so as to ensure that a high-quality image of the microstructure of the sample surface can be obtained during electron microscope observation.