摘要
利用微波等离子体化学气相沉积的方法,在钛金属层上快速制备出由众多内部中空、外观呈锥形链状的碳纳米管组成的碳膜。通过扫描电镜、透射电镜、拉曼光谱等仪器分析了碳纳米管的组成。在真空条件下,测量了碳纳米管链薄膜的场电子发射特性。用热动力学过程解释了锥形碳纳米链的生长机理。
Carbon films composed of many hollow carbon nanotubes with conical appearance are rapidly prepared through microwave plasma chemical vapor deposition(CVD)on titanium metal layers.The composition of carbon nanotubes is analyzed by using scanning electron microscopy,transmission electron microscopy and Raman spectroscopy.The field electron emission characteristics of the films of carbon nanotube chains are measured in vacuum.The growth mechanism of conical carbon nanochains is explained by thermodynamic process.
作者
高金海
张洁
李成刚
张兵临
GAO Jinhai;ZHANG Jie;LI Chenggang;ZHANG Binglin(School of Physics and Electrical Engineering,Zhengzhou Normal University,Zhengzhou He’nan 450044,China;Key Laboratory of Material Physics of the Ministry of Education,School of Physical Engineering,Zhengzhou He’nan 450052,China)
出处
《电子器件》
CAS
北大核心
2022年第6期1354-1357,共4页
Chinese Journal of Electron Devices
基金
河南省科技攻关项目(182102210140)。
关键词
微波等离子体化学气相沉积
碳纳米管链
场发射
microwave plasma chemical vapor deposition
carbon nanotube chain
field emission