三轴微振动实时测量技术研究

Research on Real-Time Measurement Technology of Triaxial Micro-Vibration

由于半导体生产及检测设备对环境微振动要求十分严格,设计了一种用于振动敏感区域微振动测量的三轴微振动实时测量系统。针对微振动测量过程中噪声干扰问题,提出了一种非对称广义高斯曲线拟合分频段积分算法。对由希尔伯特变换获取的加速度频谱峰值区域进行拟合,得到拟合曲线;通过设置积分频段抑制系数获取有效积分频段后进行频域积分得到微振动速度信号。数值仿真实验结果显示该算法在应对非对称加速度频谱时有更好的抗噪性能。利用低频标准振动平台和激光多普勒测振仪进行校准实验,结果显示去噪后的峰峰值相对误差相比于去噪前从35.11%下降至3.43%。仿真和校准实验结果表明,测量系统及算法能够对微振动信号进行准确测量及处理,抗噪性能较强。

Due to high demands on environmental micro-vibrations measurement of semiconductor manufacturing and detection equipment,a three-axis real-time micro-vibration measurement system was designed.In response to the problem of noise interference,an integration algorithm,using asymmetric generalized Gaussian curve fitting method,was proposed.The peak areas,segmented through Hilbert transform,were fitted to get the fitting curve.Then the micro-vibration velocity was achieved through integration in frequency domain within the effective integral frequency band,obtained with setting the suppression coefficient.Numerical simulation experiment demonstrates that the algorithm has a high performance for noise suppression when dealing with asymmetric acceleration spectrum.The calibration experiment’s results show that the relative error of the peak-to-peak vibration velocity is reduced from 35.11%to 3.43%than before.The results of simulation and calibration experiments show that the measurement system and algorithm can complete accurate measurement and signal process and have high performance for noise suppression.