高精密清洗技术在OLED制备过程中的应用

Application of High Precision Cleaning Technology in OLED Production

在OLED生产过程中,需要多次使用到清洗工艺,清洗后基板的洁净度将决定OLED的良率。随着OLED显示屏行业的发展,对清洗工艺及设备的要求越来越严格,制造过程的清洗皆为精密清洗,为了达到良好的清洗效果,必须不断提高洁净技术。

In the OLED production processes,there needs to use many times of cleaning processes.The cleanliness of the substrate after cleaning will affect the yied of OLED products.With the development of the OLED display industry,the requirements for cleaning processes and equipments are becoming more and more strict.Almost all cleaning processes are precision cleaning.In order to achieve good cleaning effect,it is necessary to improve the technical requirements for substrate cleaning.