印制电路板集成螺线管型磁芯电感的制作

Fabrication of integrated solenoid core inductors on printed circuits board

为了满足未来移动设备对电路系统高性能、微型化的需求,研究了集成式电压调节器中使用的集成式磁芯电感的制作问题。将磁性粉末与环氧树脂混合制备复合磁性材料作为集成式磁芯电感的磁芯材料,通过丝网印刷工艺沉积磁芯层,采用先进印制电路板制作工艺制备出高感值密度、高品质因子的集成式螺线管型磁芯电感。该集成式螺线管型磁芯电感基于垂直实心铜柱互联形成绕组,展现出优异的性能。并经过一系列的表征证明了其制作工艺的可靠性与创新性,非常适用于板级封装的电源管理模块。最终对其电感性能进行测量,在100 MHz时其单位面积电感密度达到7.35 nH/mm^(2),品质因子Q达到42.7。

In order to meet the demand for high performance and miniaturization ofthe circuit systems for future mobile devices,this paper investigates the fabrication of integrated core inductors used in integrated voltage regulator.By mixing the magnetic powder with the epoxy resin to produce a composite magnetic material as the core material of the integrated core inductor,the core layer was deposited by screen printing and the advanced printed circuit board fabrication process,and an integrated solenoid type core inductor with high inductance density and high quality factor was fabicated.The integrated solenoid core inductor was based on interconnected vertical solid copper pillars to form the windings and it exhibited excellent performance.A series of characterizations demonstrated the reliability and innovation of the manufacturing process for board-level packaged power management module.The inductance density of 7.35 nH/mm^(2)and a quality factor Q of 42.7 at 100 MHz were realized.