氦气纯度低导致PVD腔室冷泵异响问题的分析方法

Analysis Method for Abnormal Noise of PVD Chamber Cooling Pump Caused by Low Purity of Helium

冷泵是PVD设备重要的组成部分,主要负责保持腔室内的真空环境,它利用高纯度氦气的压缩膨胀循环来达到冷板低温,通过低温冷板捕捉腔室内的气体达到高真空度的环境。若冷泵出现故障,将直接影响腔室内的真空度,间接地影响晶圆的加工质量;本文主要介绍由于氦气纯度低导致冷泵异响的一种分析方法。

The cold pump is an important part of PVD equipment.It is mainly responsible for maintaining the vacuum environment in the chamber.It uses the compression and expansion cycle of high-purity helium gas to achieve the low temperature of the cold plate,and captures the gas in the chamber through the low temperature cold plate to achieve high vacuum degree.environment of.If the cold pump fails,it will directly affect the vacuum degree in the chamber and indirectly affect the processing quality of the wafer.This article mainly introduces an analysis method for the abnormal noise of the cold pump caused by the low purity of helium.